TOM 9 – Frontiers in Optical Metrology

TOPICS

Topics include but are not limited to:

• Modelling of light-structure interaction
• Quantitative optical inspection methods
• High-NA systems
• 3D-Metrology
• Form and surface metrology
• Quantum enhanced optical  sensors
• Optical length metrology
• Aberration retrieval
• Remote sensing
• Scatterometry
• Ellipsometry
• Interferometry and holography
• Deflectometry

CHAIRS

• Chair: Bernd Bodermann, Physikalisch-Technische Bundesanstalt (PTB) (DE) 
• Co-chair: Omar El Gawhary, Van Swinden Laboratory (VSL) (NL)

PROGRAMME COMMITTEE

• Axel Wiegmann, Physikalisch-Technische Bundesanstalt (PTB) (DE)
• Dirk Voigt, VSL Dutch Metrology Institute (NL)
• Jens Flügge, Physikalisch-Technische Bundesanstalt (PTB) (DE)
• Martin Foldyna, École Polytechnique (FR)

PLENARY SPEAKER

• H. Philip Stahl, NASA MSFC, SPIE President (US) 

INVITED SPEAKERS

• John Rodenburg, Sheffield University (GB)
• Matthias Richter, PTB (DE)
• Gunther Notni, Universität Jena (DE): High-resolution dynamic 3D-shape measurement
• Vittorio Giovannetti, Scuola Normale di Pisa (IT)